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Paperback Multilayer Integrated Film Bulk Acoustic Resonators Book
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ISBN: 3642427553

ISBN13: 9783642427558

Multilayer Integrated Film Bulk Acoustic Resonators

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Format: Paperback

Condition: New

$109.99
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Book Overview

Introduction.- Propagation of Acoustic Wave in Crystals.- The Theory of FBAR.- The Sputtering Deposition and Etching of AlN Film.- The Membrane Structured FBAR.- Solidly Mounted Acoustic Resonator.- The Application of FBAR in RF Filters.- The FBAR Excited by Lateral Filed.- High Sensitive Sensors Based on FBAR.

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Engineering Science Science & Math Science & Scientists Science & Technology Technology

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